Apparatus and method for profiling a beam

ABSTRACT

An apparatus and a method for profiling the intensity of a beam and thus measuring the overall intensity and power of a beam are disclosed that have particular use in stereolithography. A beam sensor comprising a pinhole in a plate and a photodetector behind the pinhole measures the intensity of portions of a beam as the beam is moved over the beam sensor. Software associated with the sensors in a computer controls the scanning mechanism for the beam so that the beam is shifted to find the pinhole and move across it in order to develop the intensity profile. The invention can be used to detect drift in the scanning mechanism, determine the focus of the beam, and predict the depth and width of photopolymer cured by the beam.

This is a continuation of co-pending application Ser. No. 07/268,816,filed on Nov. 8, 1988 now U.S. Pat. No. 5,058,988 which is acontinuation-in-part of U.S. patent application Ser. No. 182,830, filedApr. 18, 1988, now U.S. Pat. No. 5,059,359. Related applications filedconcurrently on that date are U.S. patent application Ser. Nos. 182,823,now abandoned; 183,016, now U.S. Pat. No. 4,996,010; 183,015, now U.S.Pat. No. 5,015,424; 182,801, now U.S. Pat. No. 4,999,143; 183,014, nowabandoned; and 183,012, now abandoned all of which are hereby fullyincorporated herein by reference. Continuations-in-part of U.S. patentapplication Ser. Nos. 182,830, 183,016; 183,014; and 183,012, are beingconcurrently filed herewith, all of which are hereby fully incorporatedherein by reference. These concurrently filed applications are U.S. Pat.Ser. Nos. 269,801, now abandoned; 268,907, now U.S. Pat. No. 5,059,021;268,837, now U.S. Pat. No. 5,123,734; 268,408, now abandoned; 268,428,now abandoned; and 268,429, now U.S. Pat. No. 5,076,974.

BACKGROUND OF THE INVENTION

This invention relates generally to apparatus and methods for measuringbeams of electromagnetic radiation or particles and, more particularly,to a new apparatus and method for measuring the intensity profile ofbeams in connection with the production of three-dimensional objects bystereolithography.

In recent years, "stereolithography" systems, such as those described inU.S. Pat. No. 4,575,330 entitled "Apparatus For Production OfThree-dimensional Objects By Stereolithography," have come into use. Thedisclosure of U.S. Pat. No. 4,575,330 is hereby incorporated byreference, as if fully set forth herein. Basically, stereolithography isa method for automatically building complex plastic parts bysuccessively printing cross-sections of photocurable polymer or the likeon top of each other until all of the thin layers are joined together toform a whole part. With this technology, the parts are literally grownin a vat of liquid plastic. This method of fabrication is extremelypowerful for quickly reducing design ideas to physical form and formaking prototypes.

Photocurable polymers ("photopolymers") change from liquid to solid inthe presence of light and their photospeed with ultraviolet light (UV)is fast enough to make them practical model building materials. Thematerial that is not polymerized when a part is made is still usable andremains in the vat as successive parts are made. An ultraviolet lasermay be used which generates a small intense spot of UV light. This spotis moved across the liquid surface with a galvanometer X-Y mirrorscanner. The scanner is driven by computer generated vectors or thelike. Precise and complex patterns can be rapidly produced with thistechnique.

The laser scanner, the photopolymer vat, and an elevator, along with acontrolling computer, combine together to form a stereolithographyapparatus, referred to as an "SLA." An SLA is programmed toautomatically make a plastic part by "drawing" one cross-section at atime, and building it up layer by layer.

Stereolithography represents an unprecedented way to quickly makecomplex or simple parts without tooling. Since this technology dependson using a computer to generate its cross-sectional patterns, a naturaldata link to CAD/CAM exists.

To be effective, a stereolithography system must have information aboutthe focus, laser beam oscillation mode, beam power, intensitydistribution or profile, and scanning system drift of the drawing laserin order to carry out the accurate and efficient production of parts(objects made by stereolithography are known as "parts"). The beam mustbe in relative focus at the surface of the working photopolymer fluid.The laser mode, intensity distribution, and beam power are important tothe depth and width of cure of the working fluid, as well as the scanspeed. The "drift" of the scanning system must be measured and correctedperiodically.

Beam profile (a profile of the intensity of the beam) measurementsprovide useful information about the beam because they can helpaccomplish the following purposes: 1. Focus optics and correctastigmatism and other aberrations; 2. Measure the power of the beam(needed on a day to day basis); 3. Study the laser mode and changes ofthe mode; 4. Compensate for drift of the laser scanning system; 5. Allowrecording of the drift for later analysis of changes; 6. Automaticallycalibrate the scanners; 7. Allow easy control of beam position formaking other measurements (e.g. to independently measure the beam powerin order to find the system's power calibration factor); and 8. Permitthe prediction of the size and shape of the cured plastic trace.

Accordingly, a need exists for an apparatus and method to rapidlydetermine the profile of the beam, particularly in connection with astereolithographic apparatus.

SUMMARY OF THE INVENTION

Briefly, and in general terms, the present invention provides a new andimproved apparatus and method for profiling a beam. The apparatuscomprises means for measuring the intensity of a portion of the beamwhen the beam is incident on the measuring means and means for changingthe relative perpendicular displacement of the measuring means from anoptical path followed by the beam in order to measure the intensity ofsome or all portions of the beam along a surface substantiallyperpendicular to the optical path followed by the beam. The method forprofiling a beam comprises the step of measuring the intensity of across-sectional portion of preselected size of the beam along a surfacesubstantially perpendicular to the optical path followed by the beam andrepeating the measuring step for other portions of the beam along thesurface.

The apparatus and the method develops an intensity map of the beam alonga surface substantially perpendicular to the optical path followed bythe beam. The intensity map gives the intensities for each of theportions of preselected size of the cross-section of the beam. Theintensity profile so gained can be used to determine and adjust thefocus of the beam as well as to calculate the power of the beam (given aknown power conversion factor). The profile of the beam may be used topredict the cure depth and width of plastic created on the workingfluid. The beam profiling apparatus may be used to detect drift of theapparatus that scans the beam, by serving as a fixed reference point anddetermining the scanning apparatus coordinates of the center of thebeam, which can be used to recalibrate the positioning "map" or tablethat directs the scanning apparatus in translating computer generateddesigns to actual dimensions on the surface of the fluid that solidifiesto form the object.

The presently preferred version of the beam profiling system has asignificant advantage of economy because it uses the computing systemand light-beam positioning system which are already present in thestereolithographic apparatus. Although the present system refers to"laser beam" and "X-Y galvanometer scanning system" it is apparent thatthese advantages also apply to other possible systems with differentenergy sources or positioning means or combinations of these.

The above and other objects and advantages of this invention will beapparent from the following more detailed description when taken inconjunction with the accompanying drawings of illustrative embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1, 2 and 3 are flow charts illustrating the basic conceptsemployed in practicing the method of stereolithography;

FIG. 4 is a combined block diagram, schematic and elevational sectionalview of a stereolithography system;

FIG. 5 is a block diagram of a stereolithography system;

FIG. 6 is an exploded perspective views of a stereolithography system.

FIG. 7a is a perspective view of the major components located within thechamber assembly of a stereolithography

FIG. 7b is a rear perspective view of the electronic components in theelectronic cabinet assembly of a stereolithography system.

FIG. 8 is a perspective view of the laser and optical system in astereolithography system which utilizes the preferred embodiment of thepresent invention;

FIG. 9A is a cross-sectional schematic view of a beam profiler sensor ofthe preferred embodiment of the present invention;

FIG. 9B is a top plan view of a pinhole plate for a beam profiler sensorof the preferred embodiment of the present invention;

FIG. 10 is a block diagram showing the apparatus of a preferredembodiment of the present invention;

FIG. 11A is a functional block diagram of the preferred embodiment ofthe method of generating an intensity profile of a beam according to thepresent invention;

FIG. 11B is a functional block diagram of a method of moving a beam incarrying out the method described in FIG. 11A;

FIG. 11C is a functional block diagram of a method of reading theintensity of a portion of a beam in carrying out the method described inFIG. 11A;

FIG. 12 is a functional block diagram showing process and analyses whichmay be coupled with the method described in FIG. 11A;

FIG. 13 is a chart showing a sample intensity profile for a beamgenerated by a preferred embodiment of the invention;

FIG. 14 shows predicted cure depth profiles along two axes generatedfrom beam profile information from a preferred embodiment of the presentinvention; and

FIG. 15 depicts a cross-section of a cured photopolymer trace caused byexposure to a beam.

DESCRIPTION OF THE PREFERRED EMBODIMENT:

The stereolithographic system with which the apparatus and method of thepreferred embodiment of the present invention is used generatesthree-dimensional objects by creating a cross-sectional pattern of theobject to be formed at a selected surface of a fluid medium, e.g., a UVcurable liquid or the like, capable of altering its physical state inresponse to appropriate synergistic stimulation such as impingingradiation beams, or electron or other particle beam bombardment.Successive adjacent laminae, representing corresponding successiveadjacent cross-sections of the object, are automatically formed andintegrated together to provide a step-wise laminar or thin layer buildupof the object, whereby a three-dimensional object is formed and drawnfrom a substantially planar or sheet-like surface of the fluid mediumduring the forming process. The technique is generally described in theflow charts and diagrams of FIGS. 1-5.

A stereolithographic system is shown in elevational cross-section inFIG. 4. A container 21 is filled with a UV curable liquid 22 or thelike, to provide a designated working surface 23. A programmable sourceof ultraviolet light 26 or the like produces a spot of ultraviolet light27 in the plane of surface 23. The spot 27 is movable across the surface23 by the motion of mirrors or other optical or mechanical elements (notshown in FIG. 4) used with the light source 26. The position of the spot27 on surface 23 is controlled by a computer control system 28. Thesystem 28 may be under control of CAD data produced by a generator 20 ina CAD design system or the like and directed in PHIGS format or itsequivalent to a computerized conversion system 21 where informationdefining the object is specially processed to reduce stress, curl anddistortion, and increase resolution, strength and accuracy ofreproduction.

A movable elevator platform 29 inside container 21 can be moved up anddown selectively, the position of the platform being controlled by thesystem 28. As the device operates, it produces a three-dimensionalobject 30 by step-wise buildup of integrated laminae such as 30a, 30b,30c.

The surface of the UV curable liquid 22 is maintained at a constantlevel in the container 21, and the spot of UV light 27, or othersuitable form of reactive stimulation, of sufficient intensity to curethe liquid and convert it to a solid material is moved across theworking surface 23 in a programmed manner. As the liquid 22 cures andsolid material forms, the elevator platform 29 that was initially justbelow surface 23 is moved down from the surface in a programmed mannerby any suitable actuator. In this way, the solid material that wasinitially formed is taken below surface 23 and new liquid 22 flowsacross the surface 23. A portion of this new liquid is, in turn,converted to solid material by the programmed UV light spot 27, and thenew material adhesively connects to the material below it. This processis continued until the entire three-dimensional object 30 is formed. Theobject 30 is then removed from the container 21, and the apparatus isready to produce another object. Another object can then be produced, orsome new object can be made by changing the program in the computer 28.

The light source 26 of a stereolithography system according to apreferred embodiment of the invention is typically a helium-cadmiumultraviolet laser such as the Model 4240-N HeCd Multimode Laser, made byLiconix of Sunnyvale, Calif.

A commercial stereolithography system will have additional componentsand subsystems besides those previously shown in connection with theschematically depicted systems of FIGS. 1-5. For example, the commercialsystem would also have a frame and housing, and a control panel. Itshould have means to shield the operator from excess UV and visiblelight, and it may also have means to allow viewing of the object 30while it is being formed. Commercial units will provide safety means forcontrolling ozone and noxious fumes, as well as conventional highvoltage safety protection and interlocks. Some commercial units willalso have means to effectively shield the sensitive electronics fromelectronic noise sources.

The commercialized SLA is a self-contained system that interfacesdirectly with the user's CAD system. A commercialized SLA containing thepreferred embodiment of the apparatus of the present invention, as shownin FIGS. 6 and 7, consists of four major component groups: the SLICEcomputer terminal, the electronic cabinet assembly, the optics assembly,and the chamber assembly. A block diagram of the commercialized SLA isshown in FIG. 5.

The electronic cabinet assembly includes the process computer, keyboard,monitor, power supplies, ac power distribution panel, and control panel.The computer assembly includes plug-in circuit boards for control of theterminal, high-speed scanner mirrors, and vertical (Z-stage) elevator.Power supplies for the laser, dynamic mirrors, and elevator motor aremounted in the lower portion of the cabinet.

The control panel includes a power on switch/indicator, a chamber lightswitch/indicator, a laser on indicator, and a shutter open indicator.

Operation and maintenance parameters, including fault diagnostics andlaser performance information, are also typically displayed on themonitor. Operation is controlled by keyboard entries. Work surfacesaround the keyboard and computer are covered with formica or the likefor easy cleaning and long wear.

Turning to FIG. 8, the helium cadmium (HeCd) laser 100 and opticalcomponents are mounted on top of the electronic cabinet and chamberassembly 102. The laser and optics plate may be accessed for service byremoving separate covers. For safety reasons, a special tool is requiredto unlock the cover fasteners and interlock switches are activated whenthe covers are removed. The interlocks activate a solenoid-controlledshutter to block the laser beam when either cover is removed.

As shown in FIG. 8, the shutter assembly 104, two ninety degreebeam-turning mirrors 106, 108, a beam expander 110, an X-Y scanningmirror assembly 112, and precision optical window 114 are mounted on theoptics plate. The rotary solenoid-actuated shutters are installed at thelaser output and rotate to block the beam when a safety interlock isopened. The ninety degree beam-turning mirrors 106, 108 reflect thelaser beam to the next optical component. The beam expander 110 enlargesand focuses the laser beam on the liquid surface. The high speedscanning mirrors direct the laser beam to trace vectors on the resinsurface. The 2-mirror, 2-axis galvanometer scan heads sold by GeneralScanning Inc. of Watertown, Mass. have been found to be satisfactory forthis purpose and in a preferred embodiment their Model DX-2005 servo andModel XY-0507 galvanometer X-Y scanning heads are used. A quartz window114 between the optics enclosure and reaction chamber allows the laserbeam to pass into the reaction chamber, but otherwise isolates the tworegions.

The chamber assembly contains an environmentally-controlled chamber,which houses a platform, resin vat, elevator, and beam profilers.

The chamber in which the object is formed is designed for operatorsafety and to ensure uniform operating conditions. The chamber may beheated to approximately 40° C. (104° F.) and the air is circulated andfiltered. An overhead light illuminates the reaction vat and worksurfaces. An interlock on the access door activates a shutter to blockthe laser beam when opened.

The resin vat is designed to minimize handling of the resin. It istypically installed in the chamber on guides which align it with theelevator and platform.

The object is formed on a platform attached to the vertical axiselevator, or Z-stage. The platform is immersed in the resin vat and itis adjusted incrementally downward while the object is being formed. Toremove the formed part, it is raised to a position above the vat. Theplatform is then disconnected from the elevator and removed from thechamber for post processing. Handling trays are usually provided tocatch dripping resin.

Two beam profiler sensors 116, 118 according to the preferred embodimentof the present invention are mounted at the sides of the resin vat andthe focal point of the laser optical system is adjusted to match radialsensor positions (i.e., they are mounted at a radial distance from thegalvanometer scanners equal to the distance from the galvanometers to apoint 0.3 inches below the surface of the liquid). (See FIG. 7). Thescanning mirror is periodically commanded to direct the laser beam ontothe beam profiler sensors, which measure the beam intensity profile. Thedata may be displayed on the terminal, either as a profile withrepresentation of intensity values or as a single number representingthe overall (integrated) beam intensity. This information is used todetermine whether the mirrors should be cleaned and aligned, whether thelaser should be serviced, whether the scanner mirrors have drifted, andwhat parameter values will yield cured vectors of the desired thicknessand width.

The beam profiler sensors 116, 118 are symmetrically placed relative tothe center of the resin vat. (See FIG. 7). They should preferably havesimilar X and Y offsets as measured from the vat center (of oppositevalues) although this is not required; that is to say, they are on adiagonal of the stereolithographic apparatus. In FIG. 7, the beamprofiler sensors 116, 118 are seen in the corners of the chamberassembly. The distance from the second scanning mirror on the opticalplate above the chamber assembly to each beam profiler sensor apertureis the focal length which equals the desired liquid to scanning mirrorlength plus a small increment. In the SLA-1 sold by 3D Systems, Inc.(which is shown in FIGS. 6 and 7), this liquid to scanning mirror lengthis approximately 27 inches and the small increment is an additional 0.3inches, therefore the focal length is approximately 27.3". Thedistancing of the beam profiler sensors 116, 118 from the second mirrorby the desired focal length has the effect of detecting the best averagefocus for the designated surface of the photopolymer in the SLA-1 resinvat. At the center of the resin vat, when the photopolymer is at thedesired level, the focal length of the laser beam will be 0.3 inchesbelow the surface of the photopolymer. The focus of the beam at thesurface of the photopolymer in the center of the resin vat will not varymuch. At the corner of the 12 inch resin vat of the SLA-1, the focallength will be approximately 1 inch above the surface of thephotopolymer. The focal length will be at the surface of thephotopolymer at a circle with a 4.2 inch radius about the center of thesurface of the photopolymer. The placement of the beam profiler sensorat the focal length is intended to obtain an optimal beam profileconsidering that the surface of the photopolymer will mostly not be atthe focal length of the laser.

FIG. 9A is a cross-sectional view of a beam profiler sensor 35 (The twodifferent sensors are labeled as sensors 116 and 118 in FIG. 7) of apreferred embodiment of the apparatus of the present invention and FIG.9B is a top plan view of a pinhole plate used in the beam profilersensor. The beam profiler sensor has a thin stainless steel metal plate40 having four etched pinholes 45 of varying size. In a preferredembodiment these holes have diameters 0.0005", 0.001", 0.002", and0.004". The pinholes each permit a small fraction of the laser beam 50incident upon the pinhole to fall on a photodetector 55 underneath theplate 40. The purpose for providing several pinholes is to permitprofiling of beams having a wide range of incident power. One of thepinholes will be best suited for measuring the intensity profile of abeam of a given incident power. For the HeCd lasers used in the SLA-1, apinhole of 2 mil (0.002 inch) diameter has been found to besatisfactory. The beam is scanned across a selected pinhole in an X Yarray to build up a two dimensional profile of the beam intensity.

As may be seen in FIGS. 7 and especially 9A, the beam profiler sensor 35has a two part housing 60. Light beam 50 enters from the right and movestoward the left in FIG. 9A. The beam profiler sensor is mounted in thecorners of the chamber assembly compartment in such a way as to preventthe resin vat from hitting the beam profiler sensor when it is movedinto and out of the compartment (see FIG. 7).

Turning to FIG. 9A the beam profiler sensor 35 comprises a split twopart housing 60, pinhole plate 40, ultra-violet transmitting filter 70that absorbs visible light and prevents spurious readings due to visiblelight. Filter 70 is a two millimeter thickness of Schott UG-11 filterglass which has been found to be acceptable for this purpose in apreferred embodiment. The characteristics of this filter providereasonable transmission of light in the 300-370 nanometer wavelengthregion with considerably less transmittance at other wavelengths. Aone-millimeter thickness of HOYA U-350 filter material would also beacceptable.

Underneath the filter 70 in the beam profiler housing is a photodiodesensor 55 which detects the ultraviolet light which passes through thefilter 70 from the pinhole 45. An EEG Vactec VTS 3072 super blueenhanced photodiode has been found to be acceptable. The output fromthis photodiode is passed to a current to voltage amplifier (not shown).An OPO7 current to voltage amplifier whose implementation is well knownto those skilled in the art has been found to be acceptable.

The pinhole plate 40 of the beam profiler sensor 35 is covered with aquartz plate (not shown). The quartz plate is cleanable and protects thebeam profiler sensor from dust and photopolymer drips. The quartz plateshould be coated to prevent internal reflections when the photosensor isnot perpendicular to the beam, in order to prevent false shapemeasurements. Optionally a diffuser (not shown) can be used between thepinholes to aid the filter to protect the optical components from damageby intense UV beams.

FIG. 10 is a block diagram showing the apparatus of the preferredembodiment of the present invention. Fundamental to the invention is acontrol and analysis computer. This computer receives inputs from aprogram, a keyboard or the like and may display results through aprinter or terminal or the like. The control and analysis computer sendspositioning commands to a mirror positioning system which controls the XY scanner mirrors. The laser beam is focused by the optics shown in FIG.8 to reach the X Y scanner mirrors and is directed by those mirrors toone of the beam profiler sensors. The use of two beam profiler sensorsis recommended for the purpose of drift correction. The sensor signalfrom the beam profiler sensors is converted to a signal readable by thecomputer which is then sent back to the control and analysis computer tobe manipulated as described hereafter.

In physical terms, the beam profile method according to the presentinvention causes the beam to be moved to each of the points of an arrayon the pinhole plate centered on the best known position of the pinhole.As a result, different sectors of the beam will fall on the pinhole andwill be transmitted through the same to be detected by the photodiodeand converted into a numerical signal that can be analyzed by thecomputer. A profile of the intensity of different sectors of the beamwill be built up by the computer (see FIG. 13). This is the "intensityprofile" of the beam.

FIG. 11A is a functional block diagram showing how a beam profile isdeveloped according to the preferred embodiment of the invention. Thebest known location of a pinhole on the beam profiler sensor is calledup from memory by the control and analysis computer and sent to themirror positioning system to position the X Y scanner mirrors to directthe beam at this best known location. The control and analysis computer,through the beam positioning system, moves the beam to the first row inthe first column of a square array centered on the best known location.The intensity of the portion of the beam entering the pinhole asdetected by the beam profiler sensor is then read and is saved as wellas the mirror position commands which are associated with thatintensity. The beam is then moved in sequence from the first to the lastarray points on a particular row or column and the reading and savingintensity value steps are repeated. The beam is then moved in sequencefrom the first to the last array columns or rows and the moving andreading steps are then performed down each column or row. The result isthat beam intensity readings are taken for each of the positions on thearray (a "position" is known to the computer as a set of mirrorpositioning commands). A standard analysis, performed by the control andanalysis computer of the array of intensity values is usually performedto generate a new best known location of the pinhole (for use inperforming the first step of the scan profile the next time) regardlessof the detailed function actually being analyzed (see FIG. 12).

FIG. 11B is a functional block diagram of a method of moving a beam andcarrying out the method described in connection with FIG. 10A. To movethe beam, the first step is to send the beam positioning information tothe servomechanism of the X Y scanner mirrors concerning the desiredlocation. The servomechanism (which may be analog or digital) then sendsa signal to the mirror drivers to position the X Y scanner mirrors to anew location. The servomechanism of the X Y scanner mirrors measures theactual position of the mirror drivers and compares the actual positionwith the intended position and adjusts the drive signals accordingly.The adjustments are continued within specification values of theintended location.

FIG. 11C is a functional block diagram of a method of reading theintensity of a portion of a beam and carrying out the method of thepreferred embodiment of the present invention. The first step is toconvert the total amount of light which passes through the pinhole intoa signal which is proportional to that amount of light. In the preferredembodiment, this process is performed by the photodiode which measuresthe light coming through the pinhole and the filter. The current fromthe photodiode is sent to a current to voltage amplifier which generatesa signal proportional to the amount of light received by the photodiode.The next step is to measure the signal, which is proportional to theamount of light received, after the signal is converted into a digitalform for numerical analysis. Amplification of the signal to provide widedynamic range of the measurement is important to obtain small butsignificant readings for the edge of the beam which would otherwise belost.

FIG. 12 is a functional block diagram showing the processes and analyseswhich may be coupled with the method described in FIG. 11A. As may beobserved from that FIGURE, a number of different processes and analysesmay be selected from a menu, the first five of which are connected tothe scan profile routine of FIG. 11A. The first step is to scan theintensity profile of the beam according to the method described inconnection with FIG. 11A. The intensity profile may be displayednumerically or in the form of a graph. As an option, the power may becalculated from the intensity profile as well as a new best knownlocation of the pinhole used. Another possible process is to add thedata generated in connection with the beam intensity profile to ahistory file with an option of displaying the history file. A furtherpossible process is to calculate and display drift information for themirror positioning system which generally involves scanning a secondseparate sensor (in the case of the preferred embodiment, another beamprofiler sensor) and then calculating and displaying the offset and gainterms of the drift. Another process is to calculate and display thepower of the beam, which involves summing up the intensities of aprofile and multiplying by a power conversion factor. The powerconversion factor can be determined, for example, by utilizing theprocess with a beam of known power or by comparing calculated power tothat of a calibrated sensor and determining required the gain factor. Afurther function is to calculate and display focus information, with apossible option of using a special transformation of the intensity dataused to calculate focus information and the use of known resinproperties to predict the shape and size of the cured traces ofphotopolymer. Another possible function is to move the beam to thedesired location for set up (to make parts), tests and so forth with anoption for searching for the sensor or scan profile from this newlocation. A useful function is to search for sensor pinholes in a spiralmove-read format. This may be necessary if the best known location ofthe pinhole is not accurate, in case when the array is traced over thebest known location the pinhole is not detected. A further step may beto verify findings (of pinhole location) by test or scan profile. Astill further function is the use of the beam profilers in calibration,which involves the measurement of the drift while obtaining acalibration map for the surface corresponding to the surface of thephotopolymer. A final function is to store in the machine the parametersof best known location, scale factors, resin properties, and so forth.

FIG. 13 is a chart showing a sample intensity profile for a laser beamas generated by a preferred embodiment of the present invention. Thenumerical values correspond to the measured intensity of a beam from apreferred embodiment of the present invention. The numbers have beenconverted to integers for ease of reading the display.

The intensity profile generated by the present invention may be used tocalculate the power of the beam and to predict the shape and dimensionof a cured trace of photopolymer (the solidified photopolymer due toexposure to the beam of UV light), as the following discussion willdemonstrate.

The intensity of the beam is measured by the beam profiling apparatuswhen the beam is directed at each point of an array on the pinholeplate, which is a surface generally perpendicular to the optical pathtaken by the beam. The X and Y directions on this surface correspond tothe directions taken by the beam when one or the other of the scanningmirrors rotate.

The X and Y array coordinates are 1 to i_(max) and 1 to j_(max),respectively (typically i_(max) and j_(max) are each equal to 22).

The beam is typically stepped or moved from point to point in the array,the time for the movement being much less than the time the beam remainsat a point. The distance between points is:

    s (mm)=scanstep / scalefactor [Eq. 1]

The scanstep is typically 4 "bits" and the scale factor is normally 140bits/mm. The scanning mirrors can each take on 65535 (64K) differentpositions over a 40° optical beam rotation. This in turn means that 1bit along the X or Y axis corresponds to a rotation of 6.104×10⁻⁴degrees. Since mirror to liquid distance is approximately 27" thisangular rotation corresponds to a translation at the liquid surface of2.875×10⁻⁴ inches or equivalent 137 bits/mm or approximately 140bits/mm.

The array area must cover the full beam (measurement of the entire beamis needed for power calibration as well as to produce the maximuminformation concerning the beam), and must have a number of pointssufficient to resolve the desired beam profile. Typically, the spacingbetween points in this array is less than one tenth of the beam width.The pinhole diameter should be smaller than this resolution limit.

An "element" is the portion of a beam measured when the beam is directedat a point (m,n) of the array. Each element (m,n) has an intensityreading I(m,n). The letters m,n refer to positions or points in the X, Ydirections in the array, respectively. FIG. 13 shows intensity readingsin an array much as discussed here.

The beam power is measured independently and the power calibrationfactor k is derived from the following equation: ##EQU1## The powercalibration factor k only applies to the selected pinhole and measuringsystem and laser wavelength. The independent power measurement must bemade on the beam after the beam has traversed the same number of opticalsurfaces in the beam path. These calculations also assume that thebackground light signals have been eliminated and amplifier scalingcompensated for.

The power/unit area, or intensity, at element (m,n) is given by:

    Intensity (at element m,n)=k * I(m,n) / s.sup.2 (watts/mm.sup.2) [Eq. 3]

This is the instantaneous intensity experienced by a small area in the(m,n) element, regardless of whether the beam is stationary or moving.

When the beam is moving uniformly at the speed v (mm/sec) along the Yaxis, then each element takes a time equal to s/v to pass, and theexposure, energy incident per unit area, from the element (m,n) is:

    Exposure from element (m,n)=k * I (m,n) / s.sup.2) . (s / v) (Joules/mm.sup.2)                                         [Eq. 4]

This is the energy absorbed per unit area from a particular element(m,n) of the beam.

The total exposure, beam energy incident on a unit area, as the entirebeam passes an area equivalent in size to an element, as defined above,is: ##EQU2## Physically speaking, this equation represents a situationin which the beam traverses in the Y direction over an area equivalentin size to an element of the beam as the term element is used above. Thearea is traversed by the elements of the beam corresponding to the Xcoordinate m, so the element-sized area at m is exposed to all elements(m,n) of the beam as n varies between 0 and j_(max).

The calculations described above are based on discrete elements, butcould obviously be generalized to use integrals. The movement is assumedalong the Y axis for convenience. Other angles can be simply derived,and may be necessary if the beam is asymmetrical.

The speed v corresponds to parameters SS and SP as follows:

    v=(SS / ScaleFactor)/(SP / 100,000) (mm/sec)               [Eq. 6]

Where:

SS=Step Size in bits/step;

ScaleFactor normally is 140 bits/mm;

SP/100,000=Step Period in seconds (SP units are units equal to 10microsec); and

1E6=1,000,000 is a conversion factor between Joules / mm² and Joules /m² or microJoules / mm²

Equations 5 and 6 are combined to calculate the total exposure (powerincident per unit area in a given time, i.e. energy per unit area) atthe sensor or at the liquid (photopolymer) surface represented by Z=0 ata small area at position m as the beam is moved in the Y direction:##EQU3##

Finally, the absorption of the beam as it penetrates into the liquid maynow be compensated for in accordance with Beer's law:

    E(m,z)=E(m,0) * exp (-z/lambda)                            [Eq. 8]

Where:

lambda is the penetration depth (mm);

E(m,0) is the summed exposure at the surface; and

E(m,z) is the exposure at depth z below the surface (mm).

Attenuation is assumed to have no nonlinearities or time-dependence inabsorption, being represented simply by I(z)=I(z=0) * exp (-z/lambda).It is clear that appropriate modifications can be made to the foregoingcalculations to allow for deviations from the above simple absorptivebehavior.

The photopolymer has been shown experimentally to cure to a gel if theexposure is greater than a critical value Ec, so for any given systemthe shape of a trace of cured plastic can be predicted by calculatingthe locus of points having exposure Ec. Ec can be accurately andseparately measured for each photopolymer. The "gel point" gives onlythe "cured" versus "not cured" boundary, and disregards the gradient inexposure (related to penetration depth) at resin depths other than theEc boundary depth. Part strength seems to relate to the higher exposure,and so absorption characteristics should be chosen to give the best(highest) cure gradient. The gradient or penetration depth also limitsthe best available resolution in the Z direction, because some variationin exposure (crossing lines, etc.) is unavoidable and this results incure depth changes with this variation in exposure.

For any X location (m) the cured depth z_(c) (m) is found from:

    z.sub.c (m)=lambda * ln (E(m,z=0) / Ec ) [Eq. 9]

A beam profile measured with sufficient reliability and precision can beused to predict cure depths dependent only on chemical properties of aresin. FIG. 14 shows two examples of such predictions, along the X and Yaxis respectively. The profile function (m,z) also permits prediction ofthe trace width as a function of depth (and with appropriatemodifications, "beam width" and "minimum surface angle") automatically.Making and measuring "banjo tops," i.e., traces cured by the beam todirectly determine the shape and dimensions of the cured photopolymer,will only be needed as an internal check of the system. FIG. 15 shows across-section of a test trace from a banjo top. FIG. 15 should becompared with FIG. 14.

To display the predicted trace profile, a scaled diagram of cure depthversus position is plotted across the beam. The scale factor fordistance across the beam is easy, where one simply selects one column(or row, etc.) of the scan, with dimension s, to correspond to a pixelor graphics display block. The depth scale is then lambda / s pixels (orblocks) for each increase in exposure by a factor of e. The onlyarbitrary feature is the zero of depth, related to the characteristicexposure Ec of Eq. 9, or equivalent factors from Eq. 7. The useful depthto be displayed is determined by the dynamic range of the intensitymeasuring system, and truncation at I(m,n)≧ any appropriate value closeto the noise level.

Software code listings of the software of a preferred embodiment of thepresent invention are contained in the technical appendices to theparent application, Ser. No. 182,830 which are herein incorporated byreference as set forth above.

It will be apparent from the foregoing that, while particular forms ofthe invention have been illustrated and described, various modificationscan be made without departing from the spirit and scope of theinvention. Accordingly, it is not intended that the invention belimited, except as by the appended claims.

What is claimed is:
 1. An apparatus for determining a cure parameter ina stereolithography device for producing a three-dimensional object froma medium solidifiable to varying depths upon varying exposure to areaction means having portions of varying intensity, said reaction meansoperating and moving in a prescribed pattern onto the medium,comprising:at least one sensor for sensing and individually recordingthe intensity of portions of the reaction means when said portions ofthe reaction means are incident on said at least one sensor, whereby anintensity distribution for the reaction means is obtained; means foroperating and moving the reaction means relative to the medium; meansfor determining net exposure of the medium based on the sensing ofintensity by said at least one sensor and movement of the reactionmeans; and means for determining the cure parameter of the medium basedupon the determined net exposure and known properties of the medium. 2.The apparatus of claim 1, additionally comprising:an independent meansfor determining a total power in the reaction means; means for summingindividual intensity values to obtain a summed uncalibrated intensityvalue; means for calibrating the individual intensity values byutilization of a scaling factor obtained from a ratio of said totalpower and said summed uncalibrated intensity value.
 3. The apparatus ofclaim 1 wherein the reaction means comprises an electromagnetic beam. 4.The apparatus of claim 3 wherein the beam is a laser beam.
 5. Theapparatus of claim 4 wherein the means for operating and moving thereaction means comprises two rotatable mirrors for displacing thereaction means.
 6. The apparatus of claim 5 wherein the medium is afluid.
 7. The apparatus of claim 6 wherein the fluid is a photopolymer.8. The apparatus of claim 7 wherein the cure parameter is cure depth. 9.The apparatus of claim 8 wherein the means for calculating the curedepth calculates a cure depth profile.
 10. The apparatus for claim 8wherein the cure parameter is cure width.
 11. A method for calculating acure parameter in a stereolithography apparatus for producing athree-dimensional object from a medium solidifiable to varying depthsupon varying exposure to a reaction means having portions of varyingintensity, said reaction means operating and moving in a prescribedpattern on the medium, comprising the steps of:a) directing portions ofthe reaction means onto at least one sensor and sensing the intensity ofsaid portions of the reaction means, whereby an intensity distributionfor the reaction means is obtained; b) determining an exposure of themedium based on the sensed intensity of and movement of the reactionmeans; and c) determining the cure parameter of the medium based uponsaid exposure of the medium by the reaction means and knowncharacteristics of the medium.
 12. The method of claim 11 wherein thecure parameter is cure depth.
 13. The method of claim 11 wherein thecure parameter is cure width.
 14. The method of claim 11 additionallycomprising:determining a total power in the reaction means using anindependent sensor; summing individual intensity values to obtain asummed uncalibrated intensity value; calibrating the individualintensity values by utilizing a scaling factor obtained from a ratio ofsaid total power and said summed uncalibrated intensity value.
 15. Anapparatus for determining a scanning parameter necessary to achieve adesired cure parameter in a stereolithography device for producing athree-dimensional object from a medium solidifiable to varying depthsupon varying exposure to a reaction means operating in a prescribedpattern onto a surface of the medium, comprising:means for determining arequired exposure to obtain the desired cure parameter in an areaelement of the medium, based on curing characteristics of the medium;means for generating a profile of an intensity of the reaction meansincluding at least one sensor for detecting portions of the reactionmeans; means for specifying at least one scanning path of the reactionmeans as it crosses the area element of the medium; means fordetermining an integrated intensity profile of the reaction means forthe at least one scanning path by utilizing the profile of the intensityof the reaction means and the at least one scanning path; and means fordetermining the scanning parameter at which the reaction means must moveacross the area element along said at least one path, such that thereaction means appropriately exposes the area element, by utilizing theintegrated intensity profile of the reaction means, that at least onescanning path, and the required exposure.
 16. The apparatus of claim 15,additionally comprising:an independent means for determining a totalpower in the reaction means; means for summing individual intensityvalues to obtain a summed uncalibrated intensity value; means forcalibrating the individual intensity values by utilization of a scalingfactor obtained from a ratio of said total power and said summeduncalibrated intensity value.
 17. The apparatus of claim 15 wherein thereaction means comprises an electromagnetic beam.
 18. The apparatus ofclaim 17 wherein the beam is a laser beam.
 19. The apparatus of claim 18wherein the means for operating the reaction means comprises tworotatable mirrors for displacing the reaction means.
 20. The apparatusof claim 19 wherein the medium is a fluid.
 21. The apparatus of claim 20wherein the fluid medium is a photopolymer.
 22. The apparatus of claim21 wherein the cure parameter is cure depth.
 23. The apparatus of claim21 wherein the scanning parameter is scanning speed.
 24. The apparatusof claim 21 wherein the scanning parameter is step period.
 25. Theapparatus of claim 21 wherein the scanning parameter is step size.
 26. Amethod for determining a scanning parameter necessary to achieve adesired cure parameter in a stereolithography device for producing athree-dimensional object from a medium solidifiable to varying depthsupon varying exposure to a reaction means operating in a prescribedpattern onto a surface of the medium, comprising the stepsof:determining a required exposure to obtain the desired cure parameterin an area element of the medium, based on characteristics of themedium; generating a profile of an intensity of the reaction meansincluding using a sensor to detect portions of the reaction means;specifying at least one scanning path of the reaction means as itcrosses the area element of the medium; determining an integratedintensity profile of the reaction means for the at least one scanningpath by utilizing the profile of the intensity of the reaction means andthe at least one scanning path; and determining the scanning parameterat which the reaction means must move across the area element along saidat least one scanning path, such that the integrated intensity profileof the reaction means appropriately exposes the area element, byutilizing the integrated intensity profile of the reaction means, the atleast one scanning path of the reaction means, and the requiredexposure.
 27. The method of claim 26 wherein the cure parameter is curedepth.
 28. The method of claim 26 wherein the medium is a photopolymerhaving a critical exposure and having an absorption characteristic whichsubstantially follows Beer's law wherein the absorption characteristicis penetration depth.
 29. The method of claim 26 additionallycomprising:determining a total power in the reaction means using anindependent sensor; summing individual intensity values to obtain asummed uncalibrated intensity value; calibrating the individualintensity values by utilizing a scaling factor obtained from a ratio ofsaid total power and said summed uncalibrated intensity value.
 30. Themethod of claim 29 wherein the reaction means is a laser beam and themedium is a photopolymer.
 31. A method for determining a cure depth ofan area element of a medium in a stereolithography device for producinga three-dimensional object on substantially a layer by layer basis,wherein the medium is solidifiable to a depth which is determined byexposure of the medium to a reaction means operating in a prescribedpattern at a working surface of the medium, said reaction means havingportions of varying intensity, comprising the steps of:sensing andindividually recording the intensity of portions of the reaction meanswhen said portions of the reaction means are incident on at least onesensor, whereby an intensity distribution of the reaction means isobtained; determining net exposure in the area element of the medium atapproximately the working surface by summing the intensity of eachportion of the reaction means that is passed over the area element,wherein the intensity of each portion is multiplied by a time over whicheach portion of the reaction means is incident on the area element; anddetermining the cure depth of the area element of the medium provided bythe exposure from the reaction means and known curing properties of themedium.
 32. The method of claim 31 additionally comprising:determining atotal power in the reaction means using an independent sensor; summingindividual intensity values to obtain a summed uncalibrated intensityvalue; calibrating the individual intensity values by utilizing ascaling factor obtained from a ratio of said total power and said summeduncalibrated intensity value.
 33. In a method for determining a cureparameter in a stereolithography apparatus for producing athree-dimensional object from a medium solidifiable to varying depthsupon varying exposure to a beam of light, said beam of light operatingand moving in a prescribed pattern on the medium, comprising the step offorming successive layers of medium in preparation for formingsuccessive layers of said three-dimensional object and the step offorming said successive layers of said three-dimensional object byselectively exposing said successive layers of medium to said beam oflight, the improvement comprising the steps of:determining an exposureof the medium based on an intensity distribution of the beam of lightand movement of the beam of light including the step of directing aplurality of portions of the beam of light onto at least one sensor andmeasuring amounts of light received by said at least one sensor; anddetermining the cure parameter of the medium based upon said determinedexposure and known characteristics of the medium.
 34. In an apparatusfor determining a cure parameter in a stereolithography apparatus forproducing a three-dimensional object from a medium solidifiable tovarying depths upon varying exposure to a beam of light, said beam oflight operating and moving in a prescribed pattern on the medium,comprising means for forming successive layers of medium in preparationfor forming successive layers of said three-dimensional object and meansfor forming said successive layers of said three-dimensional object byselectively exposing said successive layers of medium to said beam oflight, the improvement comprising:at least one sensor; means fordetermining an exposure of the medium based on an intensity distributionand movement of the beam of light including means for directing aplurality of portions of the beam of light onto the at least one sensorand means for measuring amounts of light received by said at least onesensor; and means for determining the cure parameter of the medium basedupon said determined exposure and known characteristics of the medium.35. In a method for determining a desired scanning parameter necessaryto achieve a desired cure parameter in a stereolithography apparatus forproducing a three-dimensional object from a medium solidifiable tovarying depths upon varying exposure to a beam of light, said beam oflight operating and moving in a prescribed paths on the medium,comprising the step of forming successive layers of medium inpreparation for forming successive layers of said three-dimensionalobject and the step of forming said successive layers of saidthree-dimensional object by selectively exposing said successive layersof medium to said beam of light, the improvement comprising the stepsof:determining a required exposure to obtain the desired cure parameterin an area element of the medium, based on known characteristics of themedium; specifying at least one scanning path of the beam of light as itcrosses the area element of the medium; determining the scanningparameter for the beam of light, along said at least one scanning paththat yields said desired cure parameter, by utilizing the requiredexposure and by determining and utilizing an exposure of the mediumbased on an intensity profile of the beam of light and the at least onescanning path, including directing a plurality of portions of the beamof light onto at least one sensor and measuring amounts of lightreceived by said at least one sensor.
 36. In an apparatus fordetermining a desired scanning parameter necessary to achieve a desiredcure parameter in a stereolithography apparatus for producing athree-dimensional object from a medium solidifiable to varying depthsupon varying exposure to a beam of light, said beam of light operatingand moving along prescribed paths on the medium, comprising means forforming successive layers of medium in preparation for formingsuccessive layers of said three-dimensional object and means for formingsaid successive layers of said three-dimensional object by selectivelyexposing said successive layers of medium to said beam of light, theimprovement comprising:at least one sensor for sensing portions of thebeam of light; means for determining a required exposure to obtain thedesired cure parameter in an area element of the medium, based on knowncharacteristics of the medium; means for specifying at least onescanning path of the beam of light as it crosses the area element of themedium; means for determining the scanning parameter for the beam oflight, along said at least one scanning path that yields said desiredcure parameter, by utilizing the required exposure and by determiningand utilizing an exposure of the medium based on an intensity profile ofthe beam of light and the at least one scanning path, includingdirecting a plurality of portions of the beam of light onto the at leastone sensor and measuring amounts of light received by said at least onesensor.
 37. In a method for determining a cure parameter in astereolithography apparatus for producing a three-dimensional objectfrom a medium solidifiable to varying depths upon varying exposure to abeam of light, said beam of light operating and moving in a prescribedpattern on the medium, comprising the step of forming successive layersof medium in preparation for forming successive layers of saidthree-dimensional object and the step of forming said successive layersof said three-dimensional object by selectively exposing said successivelayers of medium to said beam of light, the improvement comprising thesteps of:determining a summed intensity distribution of the beam oflight, including the step of directing a plurality of portions of thebeam of light onto at least one sensor and measuring the amounts oflight received by said at least one sensor; deriving an exposure of themedium based on the summed intensity distribution of and movement of thebeam of light; and determining the cure parameter of the medium basedupon said derived exposure and known characteristics of the medium. 38.In an apparatus for determining a cure parameter in a stereolithographyapparatus for producing a three-dimensional object from a mediumsolidifiable to varying depths upon varying exposure to a beam of light,said beam of light operating and moving in a prescribed pattern on themedium, comprising means for forming successive layers of medium inpreparation for forming successive layers of said three-dimensionalobject and means for forming said successive layers of saidthree-dimensional object by selectively exposing said successive layersof medium to said beam of light, the improvement comprising:at least onesensor; means for determining a summed intensity distribution of thebeam of light, including the step of directing a plurality of portionsof the beam of light onto the at least one sensor and measuring amountsof light received by said at least one sensor; means for deriving anexposure of the medium based on the summed intensity distribution of andthe movement of the beam of light; and means for determining the cureparameter of the medium based upon said derived exposure and knowncharacteristics of the medium.
 39. In a method for determining a desiredscanning parameter necessary to achieve a desired cure parameter in astereolithography apparatus for producing a three-dimensional objectfrom a medium solidifiable to varying depths upon varying exposure to abeam of light, said beam of light operating and moving along prescribedpaths on the medium, comprising the step of forming successive layers ofmedium in preparation for forming successive layers of saidthree-dimensional object and the step of forming said successive layersof said three-dimensional object by selectively exposing said successivelayers of medium to said beam of light, the improvement comprising thesteps of:determining a required exposure to obtain the desired cureparameter in an area element of the medium, based on knowncharacteristics of the medium; specifying at least one scanning path ofthe beam of light as it crosses the area element of the medium;determining a summed intensity distribution of the beam of light alongthe at least one scanning path, comprising the step of directing aplurality of portions of the beam of light onto at least one sensor andmeasuring amounts of light received by said at least one sensor;determining the scanning parameter at which the beam of light must moveacross the area element along said at least one path, such that the beamof light appropriately exposes the area element, by utilizing theintegrated intensity profile of the beam of light, the at least one pathof the beam of light, and the required exposure.
 40. An improvedstereolithography apparatus for producing a three-dimensional objectfrom a medium solidifiable to varying depths upon varying exposure to abeam of light, said beam of light operating and moving along prescribedpaths on the medium, comprising means for forming successive layers ofmedium in preparation for forming successive layers of saidthree-dimensional object and means for forming said successive layers ofsaid three-dimensional object by selectively exposing said successivelayers of medium to said beam of light, the improvement comprising:meansfor determining a required exposure to obtain the desired cure parameterin an area element of the medium, based on known characteristics of themedium; at least one sensor; means for specifying at least one scanningpath of the beam of light as it crosses the area element of the medium;means for determining a summed intensity distribution of the beam oflight for the at least one scanning path, including means for directinga plurality of portions of the beam of light onto the at least onesensor and measuring amounts of light received by said at least onesensor; and means for determining the scanning parameter at which thebeam of light must move across the area element along said at least onepath, such that the summed intensity distribution of the beam of lightappropriately exposes the area element, by utilizing the summedintensity profile of the beam of light, the at least one path of thebeam of light, and the required exposure.